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Sachsen
Ausschreibung
SWC SU3200 Upgrade - SPM & SC2 BEoL (IPMS-CNT02.1) - PR881098 -2480-P, Sachsen - Frist 12.08.2026
Supply and installation of one SWC SU3200 upgrade including SPM and SC2 BEoL, with necessary sub‑tools or mainframe extensions to ensure sufficient media pressure, flow or concentration for all chambers.
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Leistungsbeschreibung
Supply and installation of one SWC SU3200 upgrade including SPM and SC2 BEoL, with necessary sub‑tools or mainframe extensions to ensure sufficient media pressure, flow or concentration for all chambers.
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fraunhofermediasc2spmswcupgrade
Id: cbcc0030-176c-469d-ad09-7fee8777e043